|
Book Description Bringing you up-to-date with the
latest developments in MEMS technology, this major revision of the
best-selling An Introduction to Microelectromechanical Systems
Engineering offers you a current understanding of this cutting-edge
technology. You gain practical knowledge of MEMS materials, design,
and manufacturing, and learn how it is being applied in industrial,
optical, medical and electronic markets. The second edition features
brand new sections on RF MEMS, photo MEMS, micromachining on
materials other than silicon, reliability analysis, plus an expanded
reference list.
With an emphasis on commercialized products, this unique resource
helps you determine whether your application can benefit from a MEMS
solution, understand how other applications and companies have
benefited from MEMS, and select and define a manufacturable MEMS
process for your application. You discover how to use MEMS
technology to enable new functionality, improve performance, and
reduce size and cost. The book teaches you the capabilities and
limitations of MEMS devices and processes, and helps you communicate
the relative merits of MEMS to your company's management. From
critical discussions on design operation and process fabrication of
devices and systems, to a thorough explanation of MEMS packaging,
this easy-to-understand book clearly explains the basics of MEMS
engineering, making it an invaluable reference for your work in the
field.
Download Description Bringing you up-to-date with the
latest developments in MEMS technology, this major revision of the
best-selling An Introduction to Microelectromechanical Systems
Engineering offers you a current understanding of this cutting-edge
technology. You gain practical knowledge of MEMS materials, design,
and manufacturing, and learn how it is being applied in industrial,
optical, medical and electronic markets. The second edition features
brand new sections on RF MEMS, photo MEMS, micromachining on
materials other than silicon, reliability analysis, plus an expanded
reference list. With an emphasis on commercialized products, this
unique resource helps you determine whether your application can
benefit from a MEMS solution, understand how other applications and
companies have benefited from MEMS, and select and define a
manufacturable MEMS process for your application. You discover how
to use MEMS technology to enable new functionality, improve
performance, and reduce size and cost. The book teaches you the
capabilities and limitations of MEMS devices and processes, and
helps you communicate the relative merits of MEMS to your company's
management. From critical discussions on design operation and
process fabrication of devices and systems, to a thorough
explanation of MEMS packaging, this easy-to-understand book clearly
explains the basics of MEMS engineering, making it an invaluable
reference for your work in the
field. |